Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039197 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Hiromi Kanda | 2011-10-18 |
| 7906268 | Positive resist composition for immersion exposure and pattern-forming method using the same | Shinichi Kanna, Hiromi Kanda | 2011-03-15 |
| 7892722 | Pattern forming method | Shinichi Kanna, Hiromi Kanda | 2011-02-22 |