Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080363 | Resin for hydrophobitizing resist surface, method for manufacturing the resin, and positive resist composition containing the resin | — | 2011-12-20 |
| 8039197 | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same | Haruki Inabe | 2011-10-18 |
| 8034537 | Positive resist composition and pattern forming method | Toshiaki Fukuhara, Shinichi Kanna | 2011-10-11 |
| 7998654 | Positive resist composition and pattern-forming method | Fumiyuki Nishiyama | 2011-08-16 |
| 7947421 | Positive resist composition for immersion exposure and pattern-forming method using the same | — | 2011-05-24 |
| 7906268 | Positive resist composition for immersion exposure and pattern-forming method using the same | Haruki Inabe, Shinichi Kanna | 2011-03-15 |
| 7892722 | Pattern forming method | Haruki Inabe, Shinichi Kanna | 2011-02-22 |