Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943525 | Method of producing microelectromechanical device with isolated microstructures | Lisa Z. Zhang, Lisa H. Karlin, Ruben B. Montez | 2011-05-17 |
| 7919006 | Method of anti-stiction dimple formation under MEMS | Hemant D. Desai | 2011-04-05 |