Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058143 | Substrate bonding with metal germanium silicon material | Alex P. Pamatat | 2011-11-15 |
| 7943525 | Method of producing microelectromechanical device with isolated microstructures | Lisa Z. Zhang, Lisa H. Karlin, Woo Tae Park | 2011-05-17 |