Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039312 | Method for forming a capped micro-electro-mechanical system (MEMS) device | Veera M. Gunturu, Shivcharan V. Kamaraju | 2011-10-18 |
| 7943525 | Method of producing microelectromechanical device with isolated microstructures | Lisa Z. Zhang, Ruben B. Montez, Woo Tae Park | 2011-05-17 |