Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Christian Drabe, Harald Schenk, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Alexander Wolter, Christian Drabe, Thomas Klose | 2011-04-26 |
| 7929192 | Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device | — | 2011-04-19 |
| 7898071 | Apparatus and method for housing micromechanical systems | Thor Bakke | 2011-03-01 |