Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951635 | Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use | Thomas Klose, Harald Schenk | 2011-05-31 |
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Thilo Sandner, Christian Drabe, Thomas Klose | 2011-04-26 |