Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Alexander Wolter, Thilo Sandner, Thomas Klose | 2011-04-26 |
| 7872319 | Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure | — | 2011-01-18 |