Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D650344 | Vacuum contact pad | — | 2011-12-13 |
| D649126 | Vacuum contact pad | — | 2011-11-22 |
| 8047896 | Polishing apparatus, polishing method, and processing apparatus | Kenya Ito, Masaya Seki, Hiroaki Kusa | 2011-11-01 |
| 8029333 | Device for polishing peripheral edge of semiconductor wafer | Kenya Ito, Mitsuhiko Shirakashi, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki +5 more | 2011-10-04 |
| 7976361 | Polishing apparatus and polishing method | Masaya Seki, Hiroaki Kusa, Kenya Ito | 2011-07-12 |