Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047896 | Polishing apparatus, polishing method, and processing apparatus | Tamami Takahashi, Kenya Ito, Hiroaki Kusa | 2011-11-01 |
| 8029333 | Device for polishing peripheral edge of semiconductor wafer | Tamami Takahashi, Kenya Ito, Mitsuhiko Shirakashi, Kazuyuki Inoue, Kenji Yamaguchi +5 more | 2011-10-04 |
| 7976361 | Polishing apparatus and polishing method | Tamami Takahashi, Hiroaki Kusa, Kenya Ito | 2011-07-12 |