Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047896 | Polishing apparatus, polishing method, and processing apparatus | Tamami Takahashi, Kenya Ito, Masaya Seki | 2011-11-01 |
| 7976361 | Polishing apparatus and polishing method | Tamami Takahashi, Masaya Seki, Kenya Ito | 2011-07-12 |