Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040034 | Electron source | Ryozo Nonogaki | 2011-10-18 |
| 7969080 | Electron source | Seiichi Sakawa | 2011-06-28 |
| 7919750 | Electron gun, electron beam exposure apparatus, and exposure method | Hiroshi Yasuda, Takeshi Haraguchi, Yoshihisa Ooae, Takamasa Satoh, Seiichi Sakawa +1 more | 2011-04-05 |