Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969080 | Electron source | Yoshinori Terui | 2011-06-28 |
| 7919750 | Electron gun, electron beam exposure apparatus, and exposure method | Hiroshi Yasuda, Takeshi Haraguchi, Yoshihisa Ooae, Takamasa Satoh, Yoshinori Terui +1 more | 2011-04-05 |