Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919750 | Electron gun, electron beam exposure apparatus, and exposure method | Hiroshi Yasuda, Takeshi Haraguchi, Takamasa Satoh, Yoshinori Terui, Seiichi Sakawa +1 more | 2011-04-05 |