Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8051548 | Method of manufacturing an electrostatic chuck | Yoshihiro Watanabe | 2011-11-08 |
| 8027171 | Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck | Yoshihiro Watanabe | 2011-09-27 |
| 7881036 | Electrode sheet for electrostatic chuck, and electrostatic chuck | Hiroshi Fujisawa | 2011-02-01 |