Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8051548 | Method of manufacturing an electrostatic chuck | Kinya Miyashita | 2011-11-08 |
| 8027171 | Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck | Kinya Miyashita | 2011-09-27 |