Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7881036 | Electrode sheet for electrostatic chuck, and electrostatic chuck | Kinya Miyashita | 2011-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7881036 | Electrode sheet for electrostatic chuck, and electrostatic chuck | Kinya Miyashita | 2011-02-01 |