Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076169 | Method of fabricating an electromechanical device including at least one active element | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-12-13 |
| 7993949 | Heterogeneous substrate including a sacrificial layer, and a method of fabricating it | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-08-09 |
| 7906439 | Method of fabricating a MEMS/NEMS electromechanical component | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-03-15 |