Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076169 | Method of fabricating an electromechanical device including at least one active element | Bernard Diem, Vincent Larrey, Laurent Clavelier, Emmanuel Defay | 2011-12-13 |
| 8004154 | Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method | Matthieu Cueff, Emmanuel Defay, Patrice Rey | 2011-08-23 |
| 7993949 | Heterogeneous substrate including a sacrificial layer, and a method of fabricating it | Bernard Diem, Vincent Larrey, Laurent Clavelier, Emmanuel Defay | 2011-08-09 |
| 7906439 | Method of fabricating a MEMS/NEMS electromechanical component | Bernard Diem, Vincent Larrey, Laurent Clavelier, Emmanuel Defay | 2011-03-15 |