Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076169 | Method of fabricating an electromechanical device including at least one active element | Francois Perruchot, Bernard Diem, Vincent Larrey, Emmanuel Defay | 2011-12-13 |
| 7993949 | Heterogeneous substrate including a sacrificial layer, and a method of fabricating it | Francois Perruchot, Bernard Diem, Vincent Larrey, Emmanuel Defay | 2011-08-09 |
| 7989327 | Manufacturing method for a semi-conductor on insulator substrate comprising a localised Ge enriched step | Benjamin Vincent, Jean-Francois Damlencourt | 2011-08-02 |
| 7972971 | Method for producing Si1-yGey based zones with different contents in Ge on a same substrate by condensation of germanium | Jean-Francois Damlencourt, Yves Morand | 2011-07-05 |
| 7906439 | Method of fabricating a MEMS/NEMS electromechanical component | Francois Perruchot, Bernard Diem, Vincent Larrey, Emmanuel Defay | 2011-03-15 |