Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064151 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Ulrich Schönhoff | 2011-11-22 |
| 8057053 | Device for controlling temperature of an optical element | — | 2011-11-15 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Sascha Bleidistel, Wolfgang Hummel, Arif Kazi +4 more | 2011-08-02 |