Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064151 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Markus Hauf | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064151 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Markus Hauf | 2011-11-22 |