Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027023 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Bernhard Gellrich, Jens Kugler | 2011-09-27 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Markus Hauf, Wolfgang Hummel, Arif Kazi +4 more | 2011-08-02 |