Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948695 | Optical element positioning apparatus, projection optical system and exposure apparatus | Ryo Nawata, Makoto Mizuno | 2011-05-24 |
SU
Shigeyuki Uzawa
Overall (2011): #165,119 of 364,097Top 50%
1
Patents 2011