Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054680 | Semiconductor device | Nozomu Matsuzaki, Tetsuya Ishimaru, Takashi Hashimoto | 2011-11-08 |
| 7972920 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Keiji Okamoto, Mitsuhiro Noguchi +3 more | 2011-07-05 |
| 7957195 | Semiconductor device | Masamichi Fujito, Takahiro Yokoyama, Kenji Kawada, Takashi Iwase, Yasunobu Aoki +4 more | 2011-06-07 |
| 7948695 | Optical element positioning apparatus, projection optical system and exposure apparatus | Ryo Nawata, Shigeyuki Uzawa | 2011-05-24 |
| 7894036 | Exposure apparatus | Hiroshi Ito | 2011-02-22 |