Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948695 | Optical element positioning apparatus, projection optical system and exposure apparatus | Makoto Mizuno, Shigeyuki Uzawa | 2011-05-24 |
RN
Ryo Nawata
Overall (2011): #176,022 of 364,097Top 50%
1
Patents 2011