Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004657 | Exposure apparatus, control method for the same, and device manufacturing method | Masayuki Tanabe, Yutaka Watanabe, Mika Kanehira | 2011-08-23 |
ST
Shigeru Terashima
Overall (2011): #165,318 of 364,097Top 50%
1
Patents 2011