Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004657 | Exposure apparatus, control method for the same, and device manufacturing method | Yutaka Watanabe, Shigeru Terashima, Mika Kanehira | 2011-08-23 |
MT
Masayuki Tanabe
Overall (2011): #220,382 of 364,097Top 65%
1
Patents 2011