Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004657 | Exposure apparatus, control method for the same, and device manufacturing method | Masayuki Tanabe, Yutaka Watanabe, Shigeru Terashima | 2011-08-23 |
MK
Mika Kanehira
Overall (2011): #214,547 of 364,097Top 60%
1
Patents 2011