Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, Marvin R. LaFontaine, Richard J. Rzeszut | 2011-09-20 |
| 7952851 | Wafer grounding method for electrostatic clamps | Marvin R. LaFontaine, Ari Eiriksson, Ashwin M. Purohit | 2011-05-31 |