Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, Marvin R. LaFontaine, William D. Lee | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8023247 | Electrostatic chuck with compliant coat | Ashwin M. Purohit, Marvin R. LaFontaine, William D. Lee | 2011-09-20 |