Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952851 | Wafer grounding method for electrostatic clamps | Marvin R. LaFontaine, Ashwin M. Purohit, William D. Lee | 2011-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952851 | Wafer grounding method for electrostatic clamps | Marvin R. LaFontaine, Ashwin M. Purohit, William D. Lee | 2011-05-31 |