Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7963144 | Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system | Richard Versluis, Bart Dinand Paarhuis | 2011-06-21 |
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein +8 more | 2011-06-14 |