Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083859 | Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber | Stefan Bangert, Michael Koenig, Nety M. Krishna, Byung Sung Kwak | 2011-12-27 |
| 7973345 | Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate | Uwe Hoffmann | 2011-07-05 |