Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012260 | Apparatus and method for coating an areal substrate | Jutta Trube, Dieter Haas | 2011-09-06 |
| 7973345 | Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate | Jose Manuel DIEGUEZ-CAMPO | 2011-07-05 |