Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083859 | Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber | Stefan Bangert, Jose Manuel DIEGUEZ-CAMPO, Michael Koenig, Byung Sung Kwak | 2011-12-27 |
| 8057649 | Microwave rotatable sputtering deposition | Michael W. Stowell | 2011-11-15 |