Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993465 | Electrostatic chuck cleaning during semiconductor substrate processing | Dean Jennings, Majeed A. Foad | 2011-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993465 | Electrostatic chuck cleaning during semiconductor substrate processing | Dean Jennings, Majeed A. Foad | 2011-08-09 |