Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993465 | Electrostatic chuck cleaning during semiconductor substrate processing | Majeed A. Foad, Jonathon Yancey Simmons | 2011-08-09 |
| 7910499 | Autofocus for high power laser diode based annealing system | Timothy N. Thomas | 2011-03-22 |
| 7875829 | Thermal flux processing by scanning a focused line beam | Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2011-01-25 |
| 7872209 | Thermal flux processing by scanning a focused line beam | Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2011-01-18 |