Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998358 | Peak-based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2011-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998358 | Peak-based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Bogdan Swedek | 2011-08-16 |