Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998358 | Peak-based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, David J. Lischka | 2011-08-16 |
| 7938714 | Polishing pad assembly with glass or crystalline window | Dominic J. Benvegnu, Jeffrey Drue David | 2011-05-10 |
| 7931522 | Removable optical monitoring system for chemical mechanical polishing | Dominic J. Benvegnu, Jeffrey Drue David | 2011-04-26 |