Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034726 | Interlayer dielectric material in a semiconductor device comprising a doublet structure of stressed materials | Ralf Richter, Joerg Hohage, Heike Salz | 2011-10-11 |
| 7994072 | Stress transfer by sequentially providing a highly stressed etch stop material and an interlayer dielectric in a contact layer stack of a semiconductor device | Joerg Hohage, Ralf Richter | 2011-08-09 |
| 7875561 | Interlayer dielectric material in a semiconductor device comprising stressed layers with an intermediate buffer material | Joerg Hohage, Ralf Richter | 2011-01-25 |