Issued Patents 2005
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956656 | Interferometric servo control system for stage metrology | — | 2005-10-18 |
| 6956655 | Characterization and compensation of non-cyclic errors in interferometry systems | — | 2005-10-18 |
| 6950192 | Cyclic error compensation in interferometry systems | — | 2005-09-27 |
| 6947148 | Interferometric apparatus and method with phase shift compensation | — | 2005-09-20 |
| 6924896 | Interferometry system error compensation in twin stage lithography tools | — | 2005-08-02 |
| 6917432 | Interferometers for measuring changes in optical beam direction | Justin Kreuzer | 2005-07-12 |
| 6912054 | Interferometric stage system | — | 2005-06-28 |
| 6906784 | Spatial filtering in interferometry | — | 2005-06-14 |
| 6891624 | Cyclic error reduction in average interferometric position measurements | — | 2005-05-10 |
| 6888638 | Interferometry system having a dynamic beam steering assembly for measuring angle and distance | — | 2005-05-03 |
| 6882430 | Spatial filtering in interferometry | — | 2005-04-19 |
| 6867867 | Interferometric stage metrology system | — | 2005-03-15 |
| 6856402 | Interferometer with dynamic beam steering element | — | 2005-02-15 |
| 6847029 | Multiple-source arrays with optical transmission enhanced by resonant cavities | — | 2005-01-25 |
| 6847452 | Passive zero shear interferometers | — | 2005-01-25 |
| 6842256 | Compensating for effects of variations in gas refractivity in interferometers | — | 2005-01-11 |
| 6839141 | Method and apparatus for compensation of time-varying optical properties of gas in interferometry | — | 2005-01-04 |