Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909774 | Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems | Tetsuya Oshino, Katsuhiko Murakami, Katsumi Sugisaki, Masaki Yamamoto | 2005-06-21 |
| 6890600 | SiC single crystal, method for manufacturing SiC single crystal, SiC wafer having an epitaxial film, method for manufacturing SiC wafer having an epitaxial film, and SiC electronic device | Daisuke Nakamura, Tadashi Ito, Masami Naito | 2005-05-10 |
| 6842500 | Exposure apparatus and exposure method using same | Hideki Komatsuda | 2005-01-11 |