Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909774 | Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems | Tetsuya Oshino, Hiroyuki Kondo, Katsumi Sugisaki, Masaki Yamamoto | 2005-06-21 |
| 6861656 | High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems | — | 2005-03-01 |