Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967168 | Method to repair localized amplitude defects in a EUV lithography mask blank | Donald W. Sweeney, Paul B. Mirkarimi, Henry N. Chapman | 2005-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967168 | Method to repair localized amplitude defects in a EUV lithography mask blank | Donald W. Sweeney, Paul B. Mirkarimi, Henry N. Chapman | 2005-11-22 |