Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917086 | Trilayered beam MEMS device and related methods | Svetlana Tatic-Lucic | 2005-07-12 |
| 6882264 | Electrothermal self-latching MEMS switch and method | — | 2005-04-19 |
| 6876047 | MEMS device having a trilayered beam and related methods | Dana DeReus, Subham Sett, Svetlana Tatic-Lucic | 2005-04-05 |
| 6847114 | Micro-scale interconnect device with internal heat spreader and method for fabricating same | Subham Sett | 2005-01-25 |