Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6876047 | MEMS device having a trilayered beam and related methods | Shawn Jay Cunningham, Subham Sett, Svetlana Tatic-Lucic | 2005-04-05 |
| 6876482 | MEMS device having contact and standoff bumps and related methods | — | 2005-04-05 |