Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872323 | In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactor | John Giles Langan, Randy K. Hall | 2005-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872323 | In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactor | John Giles Langan, Randy K. Hall | 2005-03-29 |