Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919690 | Modular uniform gas distribution system in an ion source | Daniel E. Siegfried, David M. Burtner, John Keem, Mark Krivoruchko, Valery Alexeyev +1 more | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919690 | Modular uniform gas distribution system in an ion source | Daniel E. Siegfried, David M. Burtner, John Keem, Mark Krivoruchko, Valery Alexeyev +1 more | 2005-07-19 |