Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919690 | Modular uniform gas distribution system in an ion source | Daniel E. Siegfried, David M. Burtner, Scott A. Townsend, Mark Krivoruchko, Valery Alexeyev +1 more | 2005-07-19 |
| 6864486 | Ion sources | Valery V. Alekseev, Vsevolod Zelenkov, Mark Krivoruchko | 2005-03-08 |